If you have a configuration that was previously working on darwin_amd64 (that is, macOS on Intel chips) then I’ve heard that it typically works okay to run the darwin_amd64 version of Terraform under Rosetta emulation just long enough to remove the obsolete provider – darwin_amd64 Terraform CLI will install and run darwin_amd64 providers – and then you can switch back to using the native darwin_arm64 port of Terraform CLI and providers once you’ve completed that update.
Once you no longer have any data "template_file" ... blocks in your configuration anymore you can run terraform apply or terraform apply -refresh-only to create a new state snapshot that doesn’t refer to that provider, after which you will no longer need to use the darwin_amd64 port.
You may need to also use newer versions of other providers to get darwin_arm64 compatibility, depending on how long ago you last upgraded them. If so, you can also complete those upgrades also using the darwin_amd64 port under emulation. As long as your .terraform.lock.hcl file selects a sufficiently-new version and includes all of the official cross-platform checksums for that version then darwin_arm64 Terraform should be able to install and use it.